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专利名称：Radiation system, radiation collector,
radiation beam conditioning system, spectralpurity filter for radiation system andmethod for forming a spectral purity filter
发明人：Vadim Yevgenyevich Banine,Wilhelmus
Petrus De Boeij,Antonius Johannes JosephusVan Dijsseldonk,Erik Roelof Loopstra,JanBernard Plechelmus Van Schoot,GerardusHubertus Petrus Maria Swinkels
申请号：US12994930申请日：20090505公开号：US09097982B2公开日：20150804
专利附图：
摘要：A radiation system is configured to generate a radiation beam. The radiationsystem comprising a chamber that includes a radiation source configured to generateradiation, a radiation beam emission aperture, and a radiation collector configured tocollect radiation generated by the source, and to transmit the collected radiation to theradiation beam emission aperture. The radiation collector includes a spectral purity filterconfigured to enhance a spectral purity of the radiation to be emitted via the aperture.
申请人：Vadim Yevgenyevich Banine,Wilhelmus Petrus De Boeij,Antonius JohannesJosephus Van Dijsseldonk,Erik Roelof Loopstra,Jan Bernard Plechelmus VanSchoot,Gerardus Hubertus Petrus Maria Swinkels
地址：Deurne NL,Veldhoven NL,Hapert NL,Eindhoven NL,Eindhoven NL,Eindhoven NL
国籍：NL,NL,NL,NL,NL,NL
代理机构：Pillsbury Winthrop Shaw Pittman LLP
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