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专利名称：High molecular weight siloxane polyimides,
intermediates therefor, and methods fortheir preparation and use
发明人：Gary C. Davis申请号：US06/6390申请日：19840810公开号：US04668755A公开日：19870526
摘要：High molecular weight siloxane polyamic acids and polyimides are prepared bythe reaction of dianhydrides with diamines in a polar aprotic solvent, all of the reagentsand solvent being highly purified and substantially anhydrous. The polyamic acids may becoated on substrates and baked to form polyimide dielectric layers. When so used, theyare free from certain disadvantages of lower molecular weight polymers, especiallyundercutting and scum formation during photolithography and etching procedures.
申请人：GENERAL ELECTRIC COMPANY
代理人：William H. Pittman,James C. Davis, Jr.,James Magee, Jr.
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