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专利名称：Cleaning apparatus and cleaning method发明人：Mitsuo Takeuchi,Michinao Nomura,Toshinori
Kasuga,Hiroaki Tamura
申请号：US12860567申请日：20100820公开号：US08496016B2公开日：20130730
专利附图：
摘要：A cleaning apparatus includes: a supply unit to supply at least an initial amountof cleaning solution to a specific portion of an object to be cleaned; an agitator to induceagitation in the cleaning solution supplied to the object; a monitoring unit to monitor an
amount of the cleaning solution and to provide a signal indicative thereof; and a controlunit to detect a threshold amount of reduction in the cleaning solution based on thesignal from the monitoring unit and accordingly to control the supply unit to supply anadditional amount of cleaning solution to the specific portion of the object.
申请人：Mitsuo Takeuchi,Michinao Nomura,Toshinori Kasuga,Hiroaki Tamura
地址：Kawasaki JP,Kawasaki JP,Kawasaki JP,Kawasaki JP
国籍：JP,JP,JP,JP
代理机构：Fujitsu Patent Center
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